JPH0353404Y2 - - Google Patents

Info

Publication number
JPH0353404Y2
JPH0353404Y2 JP3239487U JP3239487U JPH0353404Y2 JP H0353404 Y2 JPH0353404 Y2 JP H0353404Y2 JP 3239487 U JP3239487 U JP 3239487U JP 3239487 U JP3239487 U JP 3239487U JP H0353404 Y2 JPH0353404 Y2 JP H0353404Y2
Authority
JP
Japan
Prior art keywords
tank
pipe
refrigerator
refrigerant
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3239487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63139754U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3239487U priority Critical patent/JPH0353404Y2/ja
Publication of JPS63139754U publication Critical patent/JPS63139754U/ja
Application granted granted Critical
Publication of JPH0353404Y2 publication Critical patent/JPH0353404Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rigid Pipes And Flexible Pipes (AREA)
  • Electron Sources, Ion Sources (AREA)
JP3239487U 1987-03-05 1987-03-05 Expired JPH0353404Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3239487U JPH0353404Y2 (en]) 1987-03-05 1987-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3239487U JPH0353404Y2 (en]) 1987-03-05 1987-03-05

Publications (2)

Publication Number Publication Date
JPS63139754U JPS63139754U (en]) 1988-09-14
JPH0353404Y2 true JPH0353404Y2 (en]) 1991-11-21

Family

ID=30839029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3239487U Expired JPH0353404Y2 (en]) 1987-03-05 1987-03-05

Country Status (1)

Country Link
JP (1) JPH0353404Y2 (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5134439B2 (ja) * 2008-05-30 2013-01-30 株式会社日立ハイテクノロジーズ イオンビーム装置
WO2009147894A1 (ja) * 2008-06-05 2009-12-10 株式会社日立ハイテクノロジーズ イオンビーム装置
JP5033844B2 (ja) * 2009-06-30 2012-09-26 株式会社日立ハイテクノロジーズ イオン顕微鏡
JP5969586B2 (ja) * 2014-12-26 2016-08-17 株式会社日立ハイテクノロジーズ イオンビーム装置
JP7002593B2 (ja) * 2020-04-22 2022-01-20 株式会社日立ハイテク ガリウム集束イオンビームとイオン顕微鏡複合装置

Also Published As

Publication number Publication date
JPS63139754U (en]) 1988-09-14

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